Yang, Jiancheng; Chen, Zhiting; Ren, Fan; Pearton, S. J.; Yang, Gwangseok; Kim, Jihyun; Lee, Jonathan; Flitsiyan, Elena; Chernyak, Leonid; Kuramata, Akito
ArticleIssue Date2018CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.36, no.1PublisherA V S AMER INST PHYSICS