Lo, Chien-Fong; Liu, Lu; Chu, Byung-Hwan; Ren, Fan; Pearton, Stephen J.; Dore, Sylvain; Hsu, Chien-Hsing; Kim, Jihyun; Dabiran, Amir M.; Chow, Peter P.
ArticleIssue Date2012CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.30, no.1PublisherA V S AMER INST PHYSICS