ScholarWorks@Korea University

Browsing by Kim, Jun KwanAuthor

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

Showing results 1 to 1 of 1

SCIESCOPUS
Etching characteristics and mechanism of ZnO thin films in inductively coupled HBr/Ar plasma

Ham, Yong-Hyun; Efremov, Alexander; Yun, Sun Jin; Kim, Jun Kwan; Min, Nam-Ki; Kwon, Kwang-Ho

ArticleIssue Date2009CitationTHIN SOLID FILMS, v.517, no.14, pp 4242 - 4245PublisherELSEVIER SCIENCE SA
1
CONTACT US

RSS_1.0 RSS_2.0 ATOM_1.0

145 Anam-ro, Seongbuk-gu, Seoul, 02841, Korea+82-2-3290-2963

COPYRIGHT © 2021 Korea University. All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

BROWSE

한국어