Kim, Ockchul; Choi, Wonsuk; Jung, Woohyun; Jung, Sunyoung; Park, HyungDal; Jeong, Jinwoo; Chu, Jun-Uk; Park, Jong-Woong; Kim, Jinseok
ArticleIssue Date2020CitationJOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.29, no.4, pp.514 - 521PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC