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Fabrication of silicon nanodots on insulator using block copolymer thin film

Kang, G. B.; Kim, Y. T.; Park, J. H.; Kim, S. -I.; Sohn, Y. -S.

ArticleIssue Date2009CitationCURRENT APPLIED PHYSICS, v.9, no.2, pp E197 - E200PublisherELSEVIER SCIENCE BV
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