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Fabrication of a GaN template with an air tunnel in a patterned sapphire substrate using carbonization with a photoresist mask

Cho, Seunghee; Jeong, Woo Seop; Lee, Doo Won; Ahn, Min Joo; Shim, Kyu-Yeon; Byun, Dongjin

ArticleIssue Date2020CitationJAPANESE JOURNAL OF APPLIED PHYSICS, v.59, no.1PublisherIOP PUBLISHING LTD
1
STATISTICS
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