Ahn, Shihyun; Lin, Yi-Hsuan; Ren, Fan; Oh, Sooyeoun; Jung, Younghun; Yang, Gwangseok; Kim, Jihyun; Mastro, Michael A.; Hite, Jennifer K.; Eddy, Charles R., Jr., et al.
ArticleIssue Date2016CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.34, no.4PublisherA V S AMER INST PHYSICS