Chua, Beelee; Logeeswaran, V. J.; Chan, Mei-Lin; Park, Hyunkyu; Horsley, David A.; Tien, Norman C.
ArticleIssue Date2015CitationJOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.24, no.1, pp.224 - 231PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC