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Etched Surface Morphology of Heteroepitaxial Nonpolar (11(2)over-bar0) and Semipolar (11(2)over-bar2) GaN Films by Photoenhanced Chemical Wet Etching

Baik, Kwang Hyeon; Song, Hoo-Young; Hwang, Sung-Min; Jung, Younghun; Ahn, Jaehui; Kim, Jihyun

ArticleIssue Date2011CitationJOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.158, no.4, pp.D196 - D199PublisherELECTROCHEMICAL SOC INC
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STATISTICS
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