Liu, Lu; Lo, Chien-Fong; Xi, Yuyin; Wang, Yuxi; Ren, Fan; Pearton, Stephen J.; Kim, Hong-Yeol; Kim, Jihyun; Fitch, Robert C.; Walker, Dennis E., Jr., et al.
ArticleIssue Date2013CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.31, no.2PublisherA V S AMER INST PHYSICS