Ceramics used as intermetallic diffusion barriers in Pd-based composite membranes sputtered on porous nickel supports
- Authors
- Lee, Chun-Boo; Lee, Sung-Wook; Park, Jong-Soo; Ryi, Shin-Kun; Lee, Dong-Wook; Hwang, Kyung-Ran; Kim, Sung-Hyun
- Issue Date
- 25-11월-2013
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- Palladium membrane; Sputtering method; Intermetallic diffusion barrier; Hydrogen separation; Porous nickel support
- Citation
- JOURNAL OF ALLOYS AND COMPOUNDS, v.578, pp.425 - 430
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF ALLOYS AND COMPOUNDS
- Volume
- 578
- Start Page
- 425
- End Page
- 430
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/101577
- DOI
- 10.1016/j.jallcom.2013.06.007
- ISSN
- 0925-8388
- Abstract
- A ceramic barrier was introduced onto the surface of a porous nickel support (PNS) to prevent intermetallic diffusion. Al2O3 and ZrO2 were deposited on the PNS by RF sputtering to a thickness of 200 nm. Pd and Au were then deposited by DC and RF sputtering with thicknesses of 3 mu m and 0.5 mu m, respectively, on the PNS with the diffusion barrier. The permeation measurement was carried out using hydrogen and helium at 723 K and a pressure difference of 100-2000 kPa. The gas permeation tests confirmed that the hydrogen permeation flux increased with increasing pressure difference and reached 4.07 mol m(-2) s(-1) at 2000 kPa with an H-2/He selectivity of more than 5000. The ZrO2 barrier membrane provided a flux of 1.5 times higher than that achieved by the Al2O3 barrier membrane. The sputtering method was successful in depositing intermetallic diffusion barriers and Pd-Au alloy layers. (c) 2013 Elsevier B.V. All rights reserved.
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