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Effects of oxygen pressure on characteristics of 0.05Pb(Al0.5Nb0.5)O-3-0.95Pb(Zr0.52Ti0.48)O-3 thin films grown on alumina substrates by pulsed laser deposition

Authors
Kang, Min-GyuCho, Kwang-HwanJung, Woo SukCho, Bong-HeeKang, Chong-YunNahm, SahnYoon, Seok-Jin
Issue Date
1-10월-2013
Publisher
ELSEVIER SCIENCE SA
Keywords
Pb(Zr0.52Ti0.48)O-3; Pb(Al0.5Nb0.5)O-3; Pulsed laser deposition; Alumina substrate; Oxygen pressure; Piezoelectric; Thin film
Citation
SENSORS AND ACTUATORS A-PHYSICAL, v.200, pp.68 - 73
Indexed
SCIE
SCOPUS
Journal Title
SENSORS AND ACTUATORS A-PHYSICAL
Volume
200
Start Page
68
End Page
73
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/101910
DOI
10.1016/j.sna.2012.09.008
ISSN
0924-4247
Abstract
Binary system of 0.05Pb(Al0.5Nb0.5)O-3-0.95Pb(Zr0.52Ti0.48)O-3 (PAN-PZT) thin films were deposited on alumina substrates by a pulsed laser deposition method and we investigated effects of oxygen pressure on ferroelectric domain structure and the piezoelectric characteristics of the films by piezoelectric force microscope (PFM). The films in optimum oxygen pressure exhibited the remnant polarization of 58.4 and 24.4 mu C/cm(2), and 180 degrees and 90 degrees domain switching behavior were observed from PFM analysis. We obtained a large effective piezoelectric constant (d(33)) value (similar to 110 pm/V) in the films. As a result, we can determine the ferroelectric domain structure and improve the piezoelectric properties of the PAN-PZT films using an oxygen pressure control during the process and it helps to obtain suitable piezoelectric thin films for sensors and actuators applications. (C) 2012 Elsevier B.V. All rights reserved.
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Graduate School > KU-KIST Graduate School of Converging Science and Technology > 1. Journal Articles
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