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Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process

Authors
Do, Young HoJung, Woo SukKang, Min GyuKang, Chong YunYoon, Seok Jin
Issue Date
1-10월-2013
Publisher
ELSEVIER SCIENCE SA
Keywords
Films process; Ferroelectric properties; PZT; Functional applications; Laser lift-off; Transparent flexible electronics
Citation
SENSORS AND ACTUATORS A-PHYSICAL, v.200, pp.51 - 55
Indexed
SCIE
SCOPUS
Journal Title
SENSORS AND ACTUATORS A-PHYSICAL
Volume
200
Start Page
51
End Page
55
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/101922
DOI
10.1016/j.sna.2012.10.034
ISSN
0924-4247
Abstract
The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52TiO48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm(2), at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester. (C) 2012 Elsevier B.V. All rights reserved.
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