All-inkjet-printed Metal-Insulator-Metal (MIM) capacitor

Abstract

BaTiO3-resin hybrid composite is one of the most promising candidates to surmount the intrinsic process issues of pure ceramic materials such as the requirement of high temperature sintering, disability to be integrated with dissimilar materials, etc. We utilized the inkjet printing to prepare all-inkjet-printed MIM (Ag/BaTiO3-resin hybrid film/Ag) capacitor. The microstructures of the MIM capacitor were investigated to confirm the integrity of dissimilar layers within MIM capacitor. The dielectric properties of BaTiO3-resin hybrid film in MIM capacitor were also investigated by measuring its relative permittivity and loss tangent. The inkjet-printed BaTiO3-resin hybrid composite film showed that its relative permittivity and loss tangent were 70 and 0.011 at 1 MHz, respectively. (C) 2011 Elsevier B.V. All rights reserved.