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Modification of the optical properties of ZnO thin films by proton implantation

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dc.contributor.authorHam, Yong Ju-
dc.contributor.authorPark, Jun Kue-
dc.contributor.authorLee, W.-
dc.contributor.authorLee, Cheol Eui-
dc.contributor.authorPark, W.-
dc.date.accessioned2021-09-06T16:20:41Z-
dc.date.available2021-09-06T16:20:41Z-
dc.date.created2021-06-18-
dc.date.issued2012-09-
dc.identifier.issn0025-5408-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/107668-
dc.description.abstractOptical properties of proton-implanted ZnO thin film prepared by radio-frequency (rf) magneton sputtering have been studied, the optical constants being obtained from the reflectance measurements by employing Cauchy-Urbach model. Increase in the ordinary refractive index after proton implantation was explained by that in the polarizability. Besides, a slight increase in the optical band gap by proton implantation was identified and discussed in terms of the hydrogen shallow donors introduced by the proton implantation. (C) 2012 Elsevier Ltd. All rights reserved.-
dc.languageEnglish-
dc.language.isoen-
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD-
dc.subjectZINC-OXIDE-
dc.subjectSPECTROSCOPIC ELLIPSOMETRY-
dc.subjectREFRACTIVE-INDEX-
dc.subjectLAYER-
dc.subjectSUBSTRATE-
dc.subjectINCREASE-
dc.subjectHYDROGEN-
dc.subjectSILICON-
dc.titleModification of the optical properties of ZnO thin films by proton implantation-
dc.typeArticle-
dc.contributor.affiliatedAuthorLee, Cheol Eui-
dc.identifier.doi10.1016/j.materresbull.2012.05.029-
dc.identifier.scopusid2-s2.0-84864631862-
dc.identifier.wosid000309081400045-
dc.identifier.bibliographicCitationMATERIALS RESEARCH BULLETIN, v.47, no.9, pp.2403 - 2406-
dc.relation.isPartOfMATERIALS RESEARCH BULLETIN-
dc.citation.titleMATERIALS RESEARCH BULLETIN-
dc.citation.volume47-
dc.citation.number9-
dc.citation.startPage2403-
dc.citation.endPage2406-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.description.journalClass1-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.subject.keywordPlusZINC-OXIDE-
dc.subject.keywordPlusSPECTROSCOPIC ELLIPSOMETRY-
dc.subject.keywordPlusREFRACTIVE-INDEX-
dc.subject.keywordPlusLAYER-
dc.subject.keywordPlusSUBSTRATE-
dc.subject.keywordPlusINCREASE-
dc.subject.keywordPlusHYDROGEN-
dc.subject.keywordPlusSILICON-
dc.subject.keywordAuthorZnO film-
dc.subject.keywordAuthorProton implantation-
dc.subject.keywordAuthorOptical properties-
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