Ex situ annealing effect on Nb thin films prepared by DC magnetron sputtering
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Y. W. | - |
dc.contributor.author | Lee, S. -G. | - |
dc.contributor.author | Choi, J. -H. | - |
dc.date.accessioned | 2021-09-07T06:50:39Z | - |
dc.date.available | 2021-09-07T06:50:39Z | - |
dc.date.created | 2021-06-18 | - |
dc.date.issued | 2011-11 | - |
dc.identifier.issn | 0921-4534 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/111316 | - |
dc.description.abstract | We studied effect of ex situ annealing on the superconductivity of Nb thin films on a silicon wafer prepared using DC magnetron sputtering. Fifty-nanometer thick Nb thin films were deposited using a 4-in. target under an Ar pressure of 7.5 x 10(-3) Torr with a DC power of 400W and then annealed at a base pressure of 4 x 10(-6) Torr in a separate chamber. The annealing process was performed at 50, 80, 100, 150, and 300 degrees C for 15 min. The properties of the annealed Nb thin films, including the superconducting transition temperature, were investigated. The results were analyzed in association with their structural changes as observed by X-ray diffraction and scanning electron microscopy. (C) 2011 Elsevier B.V. All rights reserved. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER | - |
dc.subject | SUPERCONDUCTING PROPERTIES | - |
dc.title | Ex situ annealing effect on Nb thin films prepared by DC magnetron sputtering | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Lee, S. -G. | - |
dc.identifier.doi | 10.1016/j.physc.2011.05.156 | - |
dc.identifier.wosid | 000297433400155 | - |
dc.identifier.bibliographicCitation | PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, v.471, no.21-22, pp.1193 - 1195 | - |
dc.relation.isPartOf | PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS | - |
dc.citation.title | PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS | - |
dc.citation.volume | 471 | - |
dc.citation.number | 21-22 | - |
dc.citation.startPage | 1193 | - |
dc.citation.endPage | 1195 | - |
dc.type.rims | ART | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | SUPERCONDUCTING PROPERTIES | - |
dc.subject.keywordAuthor | Nb | - |
dc.subject.keywordAuthor | Thin film | - |
dc.subject.keywordAuthor | Annealing effect | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
(02841) 서울특별시 성북구 안암로 14502-3290-1114
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.