Fabrication of Aluminum Nano-Scale Structures using Direct-Embossing with a Nickel Template
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Oh, Sang Chul | - |
dc.contributor.author | Bae, Byeong Ju | - |
dc.contributor.author | Yang, Ki Yeon | - |
dc.contributor.author | Kwon, Moo Hyun | - |
dc.contributor.author | Lee, Heon | - |
dc.date.accessioned | 2021-09-07T07:40:48Z | - |
dc.date.available | 2021-09-07T07:40:48Z | - |
dc.date.created | 2021-06-19 | - |
dc.date.issued | 2011-10 | - |
dc.identifier.issn | 1598-9623 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/111417 | - |
dc.description.abstract | Al plate was patterned by a direct embossing process. An electroformed Ni plate with a nano-sized surface protrusion pattern was used as an embossing mold. The Ni stamp with a nano-sized surface protrusion pattern was pressed onto an electro-polished Al plate; thus, a reversed Al nano-pattern was formed on the Al surface by the localized plastic deformation of Al. The Al plate was softened by annealing at 400 degrees C for 5 min; thus, high-fidelity pattern transfer was achieved at a low embossing pressure. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | KOREAN INST METALS MATERIALS | - |
dc.subject | LOW-TEMPERATURE | - |
dc.subject | NANOIMPRINT LITHOGRAPHY | - |
dc.subject | IMPRINT LITHOGRAPHY | - |
dc.subject | STAMP FABRICATION | - |
dc.subject | LOW-PRESSURE | - |
dc.subject | FILMS | - |
dc.title | Fabrication of Aluminum Nano-Scale Structures using Direct-Embossing with a Nickel Template | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Lee, Heon | - |
dc.identifier.doi | 10.1007/s12540-011-1012-4 | - |
dc.identifier.scopusid | 2-s2.0-84863080162 | - |
dc.identifier.wosid | 000300571900012 | - |
dc.identifier.bibliographicCitation | METALS AND MATERIALS INTERNATIONAL, v.17, no.5, pp.771 - 775 | - |
dc.relation.isPartOf | METALS AND MATERIALS INTERNATIONAL | - |
dc.citation.title | METALS AND MATERIALS INTERNATIONAL | - |
dc.citation.volume | 17 | - |
dc.citation.number | 5 | - |
dc.citation.startPage | 771 | - |
dc.citation.endPage | 775 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.identifier.kciid | ART001609374 | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Metallurgy & Metallurgical Engineering | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Metallurgy & Metallurgical Engineering | - |
dc.subject.keywordPlus | LOW-TEMPERATURE | - |
dc.subject.keywordPlus | NANOIMPRINT LITHOGRAPHY | - |
dc.subject.keywordPlus | IMPRINT LITHOGRAPHY | - |
dc.subject.keywordPlus | STAMP FABRICATION | - |
dc.subject.keywordPlus | LOW-PRESSURE | - |
dc.subject.keywordPlus | FILMS | - |
dc.subject.keywordAuthor | metals | - |
dc.subject.keywordAuthor | annealing | - |
dc.subject.keywordAuthor | deformation | - |
dc.subject.keywordAuthor | extrusion | - |
dc.subject.keywordAuthor | scanning electron microscopy (SEM) | - |
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