Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting
- Authors
- Ko, Ki-Young; Her, Eun-Jin; Nichols, William T.; Lee, Heon; Do, Young Rag; Ahn, Jinho
- Issue Date
- 9월-2011
- Publisher
- ELSEVIER
- Keywords
- Nano-imprint; PDMS stamp; Photonic crystal; Thin-film phosphor; Sol-gel
- Citation
- MICROELECTRONIC ENGINEERING, v.88, no.9, pp.2930 - 2933
- Indexed
- SCIE
SCOPUS
- Journal Title
- MICROELECTRONIC ENGINEERING
- Volume
- 88
- Number
- 9
- Start Page
- 2930
- End Page
- 2933
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/111713
- DOI
- 10.1016/j.mee.2011.03.162
- ISSN
- 0167-9317
- Abstract
- The effect of a two-dimensional Y2O3:Eu3+ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y2O3:Eu3+ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y2O3:Eu3+ sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mold. The elevated pressure and temperature of the nano-imprinting process converts the Y2O3:Eu3+ sol into a Y2O3:Eu3+ gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y2O3:Eu3+ thin-film phosphor layer. The extraction efficiency of the 2D Y2O3:Eu3+ gel PC-assisted Y2O3:Eu3+ thin-film phosphor was approximately 3.7 times higher than a non-PC Y2O3:Eu3+ gel coated Y2O3:Eu3+ thin-film phosphor. (C) 2011 Elsevier B.V. All rights reserved.
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