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Fluorine doped gallium tin oxide composite films as transparent conductive oxides on polyethylene terephthalate film prepared by electron cyclotron resonance metal organic chemical vapor deposition

Authors
Park, Ji HunJang, SamseokByun, DongjinLee, Joong Kee
Issue Date
1-8월-2011
Publisher
ELSEVIER SCIENCE SA
Keywords
ECR-CVD; Electrical and optical properties; Texture coefficient; Composite film
Citation
THIN SOLID FILMS, v.519, no.20, pp.6863 - 6867
Indexed
SCIE
SCOPUS
Journal Title
THIN SOLID FILMS
Volume
519
Number
20
Start Page
6863
End Page
6867
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/111818
DOI
10.1016/j.tsf.2011.04.048
ISSN
0040-6090
Abstract
The undoped and fluorine doped gallium tin oxide composite films are prepared by an electron cyclotron resonance metal organic chemical vapor deposition. Characteristics of structural, optical and electrical properties of the fluorine doped gallium tin oxide composite thin films are investigated. The four point probe method, atomic force microscopy and X-ray photoelectron spectroscopy are employed to characterize the composite thin films. UV-visible. X-ray diffraction, scanning electron microscope and Hall measurement performed on fluorine doped gallium tin oxide composite are films deposited on polyethylene terephthalate substrates. The diffraction pattern shows the presence of tetragonal structure with (112) special orientation for fluorine doped gallium tin oxide composite films. The doped composite film on F/Ga + Sn mole ratio of 0.35 is observed the lowest electrical resistivity of 3.35 x 10(-4) Omega cm. (C) 2011 Published by Elsevier B.V.
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공과대학 (신소재공학부)
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