Improving hardness of biomedical Co-Cr by deposition of dense and uniform TiN films using negative substrate bias during reactive sputtering
DC Field | Value | Language |
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dc.contributor.author | Pham, Vuong-Hung | - |
dc.contributor.author | Yook, Se-Won | - |
dc.contributor.author | Li, Yuanlong | - |
dc.contributor.author | Jeon, Gyuran | - |
dc.contributor.author | Lee, Jung-Joong | - |
dc.contributor.author | Kim, Hyoun-Ee | - |
dc.contributor.author | Koh, Young-Hag | - |
dc.date.accessioned | 2021-09-07T11:35:44Z | - |
dc.date.available | 2021-09-07T11:35:44Z | - |
dc.date.created | 2021-06-14 | - |
dc.date.issued | 2011-06-15 | - |
dc.identifier.issn | 0167-577X | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/112227 | - |
dc.description.abstract | This paper reports the deposition of a fully dense and uniform TiN film to improve the surface hardness of Co-Cr, particularly, by applying a negative substrate bias during reactive direct current (DC) sputtering. As the TiN film was deposited with a negative substrate bias voltage of 150 V. the microstructure of the films was shifted from a columnar to non-columnar one that was observed to have a dense, uniform and smooth surface. In addition, the preferred orientation was the (111) plane when the films were deposited with a negative substrate bias; however, the (200) plane when they were deposited without a substrate bias. The deposition of the dense and uniform TiN film resulted in a significant increase of the hardness of the Co-Cr. The TiN-deposited Co-Cr with a negative substrate bias showed a very high hardness of 44.7 +/- 1.7 GPa, which was much higher than those of the bare Co-Cr (4.2 +/- 0.3 GPa) and TiN-deposited Co-Cr without a negative substrate bias (23.6 +/- 2.8 GPa). (C) 2011 Elsevier B.V. All rights reserved. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER | - |
dc.subject | ELECTROCHEMICAL CORROSION | - |
dc.subject | MECHANICAL-PROPERTIES | - |
dc.subject | THIN-FILMS | - |
dc.subject | COATINGS | - |
dc.title | Improving hardness of biomedical Co-Cr by deposition of dense and uniform TiN films using negative substrate bias during reactive sputtering | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Koh, Young-Hag | - |
dc.identifier.doi | 10.1016/j.matlet.2011.03.020 | - |
dc.identifier.scopusid | 2-s2.0-79953254531 | - |
dc.identifier.wosid | 000291293600057 | - |
dc.identifier.bibliographicCitation | MATERIALS LETTERS, v.65, no.11, pp.1707 - 1709 | - |
dc.relation.isPartOf | MATERIALS LETTERS | - |
dc.citation.title | MATERIALS LETTERS | - |
dc.citation.volume | 65 | - |
dc.citation.number | 11 | - |
dc.citation.startPage | 1707 | - |
dc.citation.endPage | 1709 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | ELECTROCHEMICAL CORROSION | - |
dc.subject.keywordPlus | MECHANICAL-PROPERTIES | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | COATINGS | - |
dc.subject.keywordAuthor | Biomaterial | - |
dc.subject.keywordAuthor | TiN coating | - |
dc.subject.keywordAuthor | Hardness | - |
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