Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications
- Authors
- Tark, Sung Ju; Kang, Min Gu; Park, Sungeun; Lee, Seung Hun; Son, Chang-Sik; Lee, Jeong Chul; Kim, Donghwan
- Issue Date
- 5월-2011
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- ZnO:Al; Hydrogenated; RF magnetron sputter; TCO; Surface textured
- Citation
- CURRENT APPLIED PHYSICS, v.11, no.3, pp.362 - 367
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- CURRENT APPLIED PHYSICS
- Volume
- 11
- Number
- 3
- Start Page
- 362
- End Page
- 367
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/112606
- DOI
- 10.1016/j.cap.2010.08.005
- ISSN
- 1567-1739
- Abstract
- In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (mu c-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n mu c-Si solar cell efficiency of 7.08%. Crown Copyright (C) 2010 Published by Elsevier B.V. All rights reserved.
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