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Fabrication of Nanometer-Scale Carbon Nanotube Field-Effect Transistors on Flexible and Transparent Substrate

Authors
Kim, Tae-GeunHwang, JongseungKang, JeongminKim, SangsigHwang, SungWoo
Issue Date
2월-2011
Publisher
AMER SCIENTIFIC PUBLISHERS
Keywords
Nanometer-Scale; Carbon Nanotube; Field-Effect Transistor; Flexible; Transport Characteristics; Electron-Beam Lithography
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.11, no.2, pp.1393 - 1396
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume
11
Number
2
Start Page
1393
End Page
1396
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/113231
DOI
10.1166/jnn.2011.3386
ISSN
1533-4880
Abstract
We have successfully fabricated nanometer-scale carbon nanotube field effect transistors (CNT FETs) on a flexible and transparent substrate by electron-beam lithography. The measured current-voltage data show good hole conduction FET characteristics, and the on/off ratio of the current is more than 10(2). The conductance (as well as current) systematically decreases with the increase of the strain, suggesting that the bending of the substrate still affects the deformation condition of the short channel CNT FETs.
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