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A dry release of polyimide electrodes using Kapton film and application to EEG signal measurements

Authors
Baek, Dong-HyunMoon, Jin-heeChoi, Yoon YoungLee, MinaChoi, Jee HyunPak, James JunghoLee, Sang-Hoon
Issue Date
1월-2011
Publisher
SPRINGER HEIDELBERG
Citation
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.17, no.1, pp.7 - 14
Indexed
SCIE
SCOPUS
Journal Title
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume
17
Number
1
Start Page
7
End Page
14
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/113436
DOI
10.1007/s00542-010-1152-3
ISSN
0946-7076
Abstract
We describe here a simple and novel method to fabricate polyimide (PI) electrodes without a complex process to release completed PI electrodes from the substrates after full-curing process. We separated the PI electrodes from the Si-wafer prior to full-curing process, and these non full-cured electrodes were placed between the Kapton films, and we performed full-curing process with these sandwiched electrodes. Then, PI electrodes were easily and clearly released from the substrate without the sacrificial layers. We assessed the mechanical properties of fabricated electrodes comparing with non full-cured PI electrodes to investigate the full-curing effect between Kapton films. The electrical property was evaluated by measuring the impedance. Testing of the cyto-toxicity of full-cured electrodes using human mesenchymal stem cells (hMSCs) and mouse fibroblasts (L929) was carried out and the electrodes fabricated by proposed method were nontoxic and could be used as implantable electrodes. We also found that the electrodes, uniformly spread on the surface of mouse skulls while maintaining close contact, could successfully measure multichannel EEG signals.
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공과대학 (전기전자공학부)
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