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Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method

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dc.contributor.authorOh, S.M.-
dc.contributor.authorKang, M.-G.-
dc.contributor.authorDo, Y.H.-
dc.contributor.authorKang, C.Y.-
dc.contributor.authorYoon, S.J.-
dc.contributor.authorNahm, S.-
dc.date.accessioned2021-09-07T20:19:25Z-
dc.date.available2021-09-07T20:19:25Z-
dc.date.created2021-06-17-
dc.date.issued2011-
dc.identifier.issn1229-7607-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/114601-
dc.description.abstractLead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO<inf>2</inf>/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150°C, 350°C and 650°C;. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a P<inf>r</inf> of 40.5 μC/cm2 and an E<inf>c</inf> of 156 kV/cm. © 2011 KIEEME. All rights reserved.-
dc.languageEnglish-
dc.language.isoen-
dc.publisherKorean Institute of Electrical and Electronic Material Engineers-
dc.subjectCondensation reactions-
dc.subjectDielectric losses-
dc.subjectGels-
dc.subjectHeat treatment-
dc.subjectSemiconducting lead compounds-
dc.subjectSol-gels-
dc.subjectSols-
dc.subjectZirconium-
dc.subjectAfter-heat treatment-
dc.subjectAlkoxide solutions-
dc.subjectCrack free-
dc.subjectGel films-
dc.subjectLead zirconate titanate-
dc.subjectLead zirconium titanate-
dc.subjectLead-zirconate-titanate films-
dc.subjectMolar ratio-
dc.subjectN vinylpyrrolidone-
dc.subjectPoly(vinyl pyrrolidone)-
dc.subjectPoly-N-vinylpyrrolidone-
dc.subjectPZT film-
dc.subjectSol-gel process-
dc.titleFabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method-
dc.typeArticle-
dc.contributor.affiliatedAuthorKang, C.Y.-
dc.identifier.doi10.4313/TEEM.2011.12.5.222-
dc.identifier.scopusid2-s2.0-84930482590-
dc.identifier.bibliographicCitationTransactions on Electrical and Electronic Materials, v.12, no.5, pp.222 - 225-
dc.relation.isPartOfTransactions on Electrical and Electronic Materials-
dc.citation.titleTransactions on Electrical and Electronic Materials-
dc.citation.volume12-
dc.citation.number5-
dc.citation.startPage222-
dc.citation.endPage225-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.identifier.kciidART001596411-
dc.description.journalClass1-
dc.description.journalRegisteredClassscopus-
dc.description.journalRegisteredClasskci-
dc.subject.keywordPlusCondensation reactions-
dc.subject.keywordPlusDielectric losses-
dc.subject.keywordPlusGels-
dc.subject.keywordPlusHeat treatment-
dc.subject.keywordPlusSemiconducting lead compounds-
dc.subject.keywordPlusSol-gels-
dc.subject.keywordPlusSols-
dc.subject.keywordPlusZirconium-
dc.subject.keywordPlusAfter-heat treatment-
dc.subject.keywordPlusAlkoxide solutions-
dc.subject.keywordPlusCrack free-
dc.subject.keywordPlusGel films-
dc.subject.keywordPlusLead zirconate titanate-
dc.subject.keywordPlusLead zirconium titanate-
dc.subject.keywordPlusLead-zirconate-titanate films-
dc.subject.keywordPlusMolar ratio-
dc.subject.keywordPlusN vinylpyrrolidone-
dc.subject.keywordPlusPoly(vinyl pyrrolidone)-
dc.subject.keywordPlusPoly-N-vinylpyrrolidone-
dc.subject.keywordPlusPZT film-
dc.subject.keywordPlusSol-gel process-
dc.subject.keywordAuthorLead zirconate titanate-
dc.subject.keywordAuthorPoly(vinylpyrrolidone)-
dc.subject.keywordAuthorSol-gel-
dc.subject.keywordAuthorThickness control-
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