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Metal nanoparticle direct inkjet printing for low-temperature 3D micro metal structure fabrication

Authors
Ko, Seung HwanChung, JaewonHotz, NicoNam, Koo HyunGrigoropoulos, Costas P.
Issue Date
12월-2010
Publisher
IOP PUBLISHING LTD
Citation
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.20, no.12
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume
20
Number
12
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/115152
DOI
10.1088/0960-1317/20/12/125010
ISSN
0960-1317
Abstract
Inkjet printing of functional materials is a key technology toward ultra-low-cost, large-area electronics. We demonstrate low-temperature 3D micro metal structure fabrication by direct inkjet printing of metal nanoparticles (NPs) as a versatile, direct 3D metal structuring approach representing an alternative to conventional vacuum deposition and photolithographic methods. Metal NP ink was inkjet-printed to exploit the large melting temperature drop of the nanomaterial and the ease of the NP ink formulation. Parametric studies on the basic conditions for stable 3D inkjet printing of NP ink were carried out. Furthermore, diverse 3D metal microstructures, including micro metal pillar arrays, helices, zigzag and micro bridges were demonstrated and electrical characterization was performed. Since the process requires low temperature, it carries substantial potential for fabrication of electronics on a plastic substrate.
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