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Fabrication of monolithic polymer nanofluidic channels using nanowires as sacrificial templates

Authors
Chu, Kyo SeonKim, SeungwookChung, HaegeunOh, Joon-HoSeong, Tae-YeonAn, Boo HyunKim, Young KeunPark, Jae HyoungDo, Young RagKim, Woong
Issue Date
22-10월-2010
Publisher
IOP PUBLISHING LTD
Citation
NANOTECHNOLOGY, v.21, no.42
Indexed
SCIE
SCOPUS
Journal Title
NANOTECHNOLOGY
Volume
21
Number
42
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/115495
DOI
10.1088/0957-4484/21/42/425302
ISSN
0957-4484
Abstract
We report a facile and reliable method to fabricate polymer-based monolithic nanofluidic channels. The nanochannels are obtained via three main steps: (1) fabrication of nanowire-transistor like structures, which are silver or zinc oxide nanowires horizontally bridging two electrodes made of zinc oxide on SiO(2)/Si substrates; (2) casting and curing polyimide solution on the nanowire structures; and (3) selective etching of the nanowire and electrode templates against the polyimide substrates. This process leads to the production of nanochannels with a diameter down to similar to 50 nm. Our method is based on nanowires that are chemically synthesized whereas nanopattern fabrication conventionally relies on expensive equipment. Moreover, the polymer nanochannels are fabricated monolithically while a process of bonding two different materials is required in traditional methods where leakage problems are often identified at the interface. Construction of nanofluidic circuitry could be expected in the future based on the current work.
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공과대학 (신소재공학부)
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