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Leakage current mechanism and effect of oxygen vacancy on the leakage current of Bi5Nb3O15 films

Authors
Cho, Kyung-HoonChoi, Chang-HakChoi, Joo-YoungSeong, Tae-GeunNahm, SahnKang, Chong-YunYoon, Seok-JinKim, Jong-Hee
Issue Date
1월-2010
Publisher
ELSEVIER SCI LTD
Keywords
Films; Capacitors; Bi5Nb3O15; Leakage current density
Citation
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, v.30, no.2, pp.513 - 516
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
Volume
30
Number
2
Start Page
513
End Page
516
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/117239
DOI
10.1016/j.jeurceramsoc.2009.04.029
ISSN
0955-2219
Abstract
The effect of oxygen partial pressure (OPP) on the leakage current density of Bi5Nb3O15 (B5N3) films grown on Pt electrodes was investigated. The leakage current density was very high for the film grown under a low OPP of 1.7 mTorr, but was significantly reduced by the subsequent annealing under a high oxygen pressure or for the film grown under high OPP of 5.1 mTorr. The variation of the leakage current density with OPP was explained by the number of oxygen vacancies, which produced electron trap sites at the interface between the Pt electrode and the B5N3 film-Schottky emission was postulated as the leakage current mechanism of the B5N3 films. The barrier height between the Pt electrode and the B5N3 film grown under a high OPP of 5.1 mTorr was approximately 1.55 eV, but decreased to 0.81 eV for the film grown under a low OPP of 1.7 mTorr due to the presence of the oxygen vacancy. (C) 2009 Elsevier Ltd. All rights reserved.
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College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles
Graduate School > KU-KIST Graduate School of Converging Science and Technology > 1. Journal Articles

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