Effect of hydrogen on the physical and mechanical properties of silicon carbide-derived carbon films
- Authors
- Choi, Hyun-Ju; Bae, Heung-Taek; McNallan, Michael J.; Sohn, Yong-Ho; Lim, Dae-Soon
- Issue Date
- 25-12월-2009
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- Silicon carbide; Chlorination; Graphitization; Nanoindentation; Plasticity
- Citation
- SURFACE & COATINGS TECHNOLOGY, v.204, no.6-7, pp.1018 - 1021
- Indexed
- SCIE
SCOPUS
- Journal Title
- SURFACE & COATINGS TECHNOLOGY
- Volume
- 204
- Number
- 6-7
- Start Page
- 1018
- End Page
- 1021
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/118727
- DOI
- 10.1016/j.surfcoat.2009.05.023
- ISSN
- 0257-8972
- Abstract
- In this study, the effect of hydrogen on the structure and mechanical properties of carbon films produced by selective etching of monolithic SiC was examined. The process to produce carbon films from SiC (i.e., SiC-derived carbon, CDC) was carried out in a gas mixture of Cl-2 and H-2 at 1000 degrees C for 20 h. The Raman intensity ratio, I-D/I-G, where subscripts D and G refer to diamond and graphite, decreased as the hydrogen concentration in the gas mixture increased, indicating a decrease in the sp(2) carbon cluster. XRD analysis also showed that the fraction of graphitization decreased as the hydrogen concentration increased. The addition of hydrogen that prevented the formation of graphite (sp(2) bonding) also resulted in a reduction in the film thickness. The hardness and elastic modulus of the carbon films tended to decrease as the H-2 content increased owing to the contribution from the C-H bond and the nano-size pore. (C) 2009 Elsevier B.V. All rights reserved.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.