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Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements

Authors
Ko, Heung ChoShin, GunchulWang, ShuodaoStoykovich, Mark P.Lee, Jeong WonKim, Dong-HunHa, Jeong SookHuang, YonggangHwang, Keh-ChihRogers, John A.
Issue Date
4-12월-2009
Publisher
WILEY-V C H VERLAG GMBH
Keywords
conformal wrapping; curvilinear electronics; elastomeric transfer; micromechanics; silicon membranes
Citation
SMALL, v.5, no.23, pp.2703 - 2709
Indexed
SCIE
SCOPUS
Journal Title
SMALL
Volume
5
Number
23
Start Page
2703
End Page
2709
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/118758
DOI
10.1002/smll.200900934
ISSN
1613-6810
Abstract
Materials and methods to achieve electronics intimately integrated on the sin-faces of substrates with complex, curvilinear shapes are described. The approach exploits silicon membranes in circuit mesh structures that can be deformed in controlled ways using thin, elastomeric films. Experimental and theoretical studies of the micromechanics of such curvilinear electronics demonstrate the underlying concepts. Electrical measurements illustrate the high yields that can be obtained. The results represent significant experimental and theoretical advances over recently reported concepts for creating hemispherical photodetectors in electronic eye cameras and for using printable silicon nanoribbons/membranes inflexible electronics. The results might provide practical routes to the integration of high performance electronics with biological tissues and other systems of interest for new applications.
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공과대학 (화공생명공학과)
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