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Optical characterization of BaSm2Ti4O12 thin films by spectroscopic ellipsometry

Authors
Yoon, J. J.Hwang, S. Y.Kang, Y. J.Kim, Y. D.Jeong, Y. H.Nahm, S.
Issue Date
29-5월-2009
Publisher
ELSEVIER SCIENCE SA
Keywords
Ellipsometry; Dielectric function; BaSm2Ti4O12
Citation
THIN SOLID FILMS, v.517, no.14, pp.3923 - 3926
Indexed
SCIE
SCOPUS
Journal Title
THIN SOLID FILMS
Volume
517
Number
14
Start Page
3923
End Page
3926
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/120008
DOI
10.1016/j.tsf.2009.01.102
ISSN
0040-6090
Abstract
We performed spectroscopic ellipsometric measurement to characterize BaSm2Ti4O12 (BST) thin films grown on Pt/Ti/SiO2/c-Si substrate by rf magnetron sputtering. The six BST films were prepared at various deposition temperatures and thermal annealing times. The resulting refractive indices and extinction coefficients of the BST films show only slight change by the deposition temperature but a significant change after thermal annealing, implying the importance of the post annealing process. The increase of the refractive index can be understood by the higher density of the BST films caused by the crystallization after annealing process. (C) 2009 Elsevier B.V. All rights reserved.
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