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UV nanoimprint using flexible polymer template and substrate
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong, Sung-Hoon | - |
| dc.contributor.author | Hwang, Jae-Yeon | - |
| dc.contributor.author | Lee, Heon | - |
| dc.contributor.author | Lee, Hee-Chul | - |
| dc.contributor.author | Choi, Kyung-Woo | - |
| dc.date.accessioned | 2021-09-08T19:17:20Z | - |
| dc.date.available | 2021-09-08T19:17:20Z | - |
| dc.date.created | 2021-06-19 | - |
| dc.date.issued | 2009-03 | - |
| dc.identifier.issn | 0167-9317 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/120473 | - |
| dc.description.abstract | Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate. (C) 2008 Elsevier B.V. All rights reserved. | - |
| dc.language | English | - |
| dc.language.iso | en | - |
| dc.publisher | ELSEVIER SCIENCE BV | - |
| dc.subject | LITHOGRAPHY | - |
| dc.subject | FABRICATION | - |
| dc.subject | MOLD | - |
| dc.title | UV nanoimprint using flexible polymer template and substrate | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Lee, Heon | - |
| dc.identifier.doi | 10.1016/j.mee.2008.09.044 | - |
| dc.identifier.scopusid | 2-s2.0-59049099165 | - |
| dc.identifier.wosid | 000264743100018 | - |
| dc.identifier.bibliographicCitation | MICROELECTRONIC ENGINEERING, v.86, no.3, pp.295 - 298 | - |
| dc.relation.isPartOf | MICROELECTRONIC ENGINEERING | - |
| dc.citation.title | MICROELECTRONIC ENGINEERING | - |
| dc.citation.volume | 86 | - |
| dc.citation.number | 3 | - |
| dc.citation.startPage | 295 | - |
| dc.citation.endPage | 298 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Article | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
| dc.relation.journalResearchArea | Optics | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
| dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
| dc.relation.journalWebOfScienceCategory | Optics | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.subject.keywordPlus | LITHOGRAPHY | - |
| dc.subject.keywordPlus | FABRICATION | - |
| dc.subject.keywordPlus | MOLD | - |
| dc.subject.keywordAuthor | UV nanoimprint lithography | - |
| dc.subject.keywordAuthor | Hot embossing | - |
| dc.subject.keywordAuthor | DLC coating | - |
| dc.subject.keywordAuthor | Flexible polymer template | - |
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