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A facile fabrication of semiconductor nanowires gas sensor using PDMS patterning and solution deposition

Authors
Hwang, In-SungKim, Yoon-SungKim, Sun-JungJu, Byeong-KwonLee, Jong-Heun
Issue Date
2-2월-2009
Publisher
ELSEVIER SCIENCE SA
Keywords
SnO2 nanowires; Solution deposition; Polydimethylsiloxane (PDMS) patterning; Nanowires network; Gas sensors
Citation
SENSORS AND ACTUATORS B-CHEMICAL, v.136, no.1, pp.224 - 229
Indexed
SCIE
SCOPUS
Journal Title
SENSORS AND ACTUATORS B-CHEMICAL
Volume
136
Number
1
Start Page
224
End Page
229
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/120596
DOI
10.1016/j.snb.2008.10.042
ISSN
0925-4005
Abstract
This paper suggests a simple and cost-effective method for fabricating nanowire (NW) gas sensors. Oxide NWs were deposited uniformly over a defined electrode area by coating with a solution containing NWs after patterning with polydimethylsiloxane (PDMS). The hydrophobic PDMS guide wall prevented outstretching of the deposited solution, which allowed the density of the NWs in the sensor to be manipulated conveniently. The high-density NWs sensor enhanced the gas sensitivity toward CO, C3H8, C2H5OH, and NO2 but reduced the gas response and recovery speed. The correlation between the NW density and gas sensing characteristics are discussed in relation to the gas sensing mechanism. (C) 2008 Elsevier B.V. All rights reserved.
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공과대학 (전기전자공학부)
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