Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Inductively coupled plasma etching of nano-patterned sapphire for flip-chip GaN light emitting diode applications

Authors
Kim, Byung-JaeMastro, Michael A.Jung, HyunjungKim, Hong-YeolKim, Sung HyunHolm, Ron T.Hite, JenniferEddy, Charles R., Jr.Bang, JoonaKim, Jihyun
Issue Date
1-9월-2008
Publisher
ELSEVIER SCIENCE SA
Keywords
light emitting diodes; surface texturing; plasma etching; sapphire; GaN
Citation
THIN SOLID FILMS, v.516, no.21, pp.7744 - 7747
Indexed
SCIE
SCOPUS
Journal Title
THIN SOLID FILMS
Volume
516
Number
21
Start Page
7744
End Page
7747
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/122728
DOI
10.1016/j.tsf.2008.05.046
ISSN
0040-6090
Abstract
The flip-chip configuration is employed for the production of high-brightness GaN-based light emitting diodes to improve the extraction of heat. A lithographic approach based on a sacrificial SiO2 nanosphere etch mask was developed to enhance the external extraction of light from the sapphire substrate. Closed-packed arrays of SiO2 nanospheres were prepared by a simple solution-based method on the sapphire substrate. Subsequent dry-etching via inductively coupled plasma using a gas mixture of BCl3 and Cl-2 transferred a pattern into the sapphire substrate with the lowest etching at the center of the SiO2 nanosphere. This process created an array of circular cones in the surface of the sapphire that were found to be effective in enhancing the light extraction efficiency through multi-photon scatterings. Room temperature photo luminescence exhibited an increase of 22.5% in intensity after the surface of sapphire was textured. (c) 2008 Elsevier B.V. All fights reserved.
Files in This Item
There are no files associated with this item.
Appears in
Collections
College of Engineering > Department of Chemical and Biological Engineering > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Altmetrics

Total Views & Downloads

BROWSE