Optical properties of BaSm2Ti4O12 thin films studied by using spectroscopic ellipsometry

Abstract

A spectroscopic ellipsometry (SE) study was performed oil BaSm2Ti4O12 (BSmT) thin films grown on TiN/SiO2/c-Si substrate grown by RF-magnetron sputtering. After deposition, the film was annealed at 400 degrees C under four different conditions of oxygen pressure. For the analysis of the measured spectra, a four-layer model containing a, BSmT film was applied, where the optical property of the BSmT layer was represented by a Tauc-Lorentz dispersion function. Our analysis clearly showed that the refractive index and the extinction coefficient of the BSmT films changed consistently with oxygen pressure during the annealing procedure.