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Electrical properties of electron-beam exposed silicon dioxides and their application to nano-devices

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dc.contributor.authorChoi, BH-
dc.contributor.authorJung, SK-
dc.contributor.authorKim, SI-
dc.contributor.authorHwang, SW-
dc.contributor.authorPark, JH-
dc.contributor.authorKim, Y-
dc.contributor.authorKim, EK-
dc.contributor.authorMin, SK-
dc.date.accessioned2021-09-09T12:39:08Z-
dc.date.available2021-09-09T12:39:08Z-
dc.date.created2021-06-18-
dc.date.issued1998-12-
dc.identifier.issn0021-4922-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/124425-
dc.description.abstractElectrical properties of the electron-beam induced cal bon contamination layers have been reported. Contacts to the contamination layers are achieved by a simple deposition of aluminum and the current-voltage characteristics are successfully measured. A double junction structure, with the size smaller than 10 nm, has been fabricated by a one-step electron beam irradiation and it exhibits Coulomb staircases at room temperature.-
dc.languageEnglish-
dc.language.isoen-
dc.publisherJAPAN J APPLIED PHYSICS-
dc.titleElectrical properties of electron-beam exposed silicon dioxides and their application to nano-devices-
dc.typeArticle-
dc.contributor.affiliatedAuthorPark, JH-
dc.identifier.doi10.1143/JJAP.37.6996-
dc.identifier.scopusid2-s2.0-19644391422-
dc.identifier.wosid000078699200066-
dc.identifier.bibliographicCitationJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.37, no.12B, pp.6996 - 6997-
dc.relation.isPartOfJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS-
dc.citation.titleJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS-
dc.citation.volume37-
dc.citation.number12B-
dc.citation.startPage6996-
dc.citation.endPage6997-
dc.type.rimsART-
dc.type.docTypeArticle; Proceedings Paper-
dc.description.journalClass1-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaPhysics-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.subject.keywordAuthorelectron-beam-
dc.subject.keywordAuthorcarbon-
dc.subject.keywordAuthorcurrent-voltage-
dc.subject.keywordAuthornano-devices-
dc.subject.keywordAuthorsingle electron tunneling-
dc.subject.keywordAuthorCoulomb staircases-
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