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나노임프린트 리소그래피를 이용한 곡면 기판 위에 정렬된 나노 볼 패턴 형성에 관한 연구
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 홍성훈 | - |
| dc.contributor.author | 배병주 | - |
| dc.contributor.author | 곽신웅 | - |
| dc.contributor.author | 이헌 | - |
| dc.date.accessioned | 2021-09-09T15:29:11Z | - |
| dc.date.available | 2021-09-09T15:29:11Z | - |
| dc.date.created | 2021-06-17 | - |
| dc.date.issued | 2008 | - |
| dc.identifier.issn | 1225-8024 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/125253 | - |
| dc.description.abstract | The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at 130℃ and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity. | - |
| dc.language | Korean | - |
| dc.language.iso | ko | - |
| dc.publisher | 한국표면공학회 | - |
| dc.title | 나노임프린트 리소그래피를 이용한 곡면 기판 위에 정렬된 나노 볼 패턴 형성에 관한 연구 | - |
| dc.title.alternative | Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 이헌 | - |
| dc.identifier.bibliographicCitation | 한국표면공학회지, v.41, no.6, pp.331 - 334 | - |
| dc.relation.isPartOf | 한국표면공학회지 | - |
| dc.citation.title | 한국표면공학회지 | - |
| dc.citation.volume | 41 | - |
| dc.citation.number | 6 | - |
| dc.citation.startPage | 331 | - |
| dc.citation.endPage | 334 | - |
| dc.type.rims | ART | - |
| dc.identifier.kciid | ART001308906 | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalRegisteredClass | kci | - |
| dc.subject.keywordAuthor | Nano-sphere | - |
| dc.subject.keywordAuthor | Flexible template | - |
| dc.subject.keywordAuthor | UV nanoimprint lithography | - |
| dc.subject.keywordAuthor | Curved substrate | - |
| dc.subject.keywordAuthor | Nano-sphere | - |
| dc.subject.keywordAuthor | Flexible template | - |
| dc.subject.keywordAuthor | UV nanoimprint lithography | - |
| dc.subject.keywordAuthor | Curved substrate | - |
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