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Patterned multiwall carbon nanotube films as materials of NO2 gas sensors

Authors
Cho, Woo-SungMoon, Seung-IlPaek, Kyeong-KapLee, Yun-HiPark, Jung-HoJu, Byeong-Kwon
Issue Date
24-11월-2006
Publisher
ELSEVIER SCIENCE SA
Keywords
diaphragm; multiwall carbon nanotubes; nitrogen dioxide (NO2); resistive gas sensor; reversible response; thermal chemical vapor deposition (CVD)
Citation
SENSORS AND ACTUATORS B-CHEMICAL, v.119, no.1, pp.180 - 185
Indexed
SCIE
SCOPUS
Journal Title
SENSORS AND ACTUATORS B-CHEMICAL
Volume
119
Number
1
Start Page
180
End Page
185
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/125920
DOI
10.1016/j.snb.2005.12.004
ISSN
0925-4005
Abstract
Multimall carbon nanotube (MWNT) films grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm have been investigated as sensing materials of resistive gas sensors for nitrogen dioxide (NO2). We fabricated the aligned MWNT films, which grew into mesh and serpentine shapes by photolithography. Photolithography patterned the cobalt catalyst layer. MWNT films showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to NO2. The sensor exhibited a reversible response at a thermal treatment temperature of 130 degrees C for a time constant of a few minutes. The resistance change to NO2 of the mesh-shaped MWNT films was found to be larger than that of the serpentine-shaped MWNT films. (c) 2005 Elsevier B.V. All rights reserved.
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