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Study on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growthStudy on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growth
- Alternative Title
- Study on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growth
- Authors
- BYUN, Dong Jin
- Issue Date
- 13-5월-2021
- Publisher
- 한국재료학회
- Citation
- 2021년도 한국재료학회 춘계학술대회
- Conference Name
- 2021년도 한국재료학회 춘계학술대회
- Place
- KO
- Conference Date
- 2021-05-13
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Collections - ETC > 2. Conference Papers
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