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Fabrication method of hole pattern SiO2 without etching using AZ positive photoresist for bottom up GaN-based nano LEDFabrication method of hole pattern SiO2 without etching using AZ positive photoresist for bottom up GaN-based nano LED
- Alternative Title
- Fabrication method of hole pattern SiO2 without etching using AZ positive photoresist for bottom up GaN-based nano LED
- Authors
- BYUN, Dong Jin
- Issue Date
- 25-11월-2021
- Publisher
- 한국재료학회
- Citation
- 2021년도 한국재료학회 추계학술대회
- Conference Name
- 2021년도 한국재료학회 추계학술대회
- Place
- KO
- Conference Date
- 2021-11-24
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