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Influence of Annealing Temperature and Time on HfZrO Ferro-Capacitor
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | LEE Jae Woo | - |
| dc.date.accessioned | 2022-01-29T04:42:36Z | - |
| dc.date.available | 2022-01-29T04:42:36Z | - |
| dc.date.created | 2022-01-29 | - |
| dc.date.issued | 2022-01-25 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/135143 | - |
| dc.publisher | 한국 반도체 산업협회 | - |
| dc.title | Influence of Annealing Temperature and Time on HfZrO Ferro-Capacitor | - |
| dc.title.alternative | Influence of Annealing Temperature and Time on HfZrO Ferro-Capacitor | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | LEE Jae Woo | - |
| dc.identifier.bibliographicCitation | 제 29회 한국 반도체학술대회 | - |
| dc.relation.isPartOf | 제 29회 한국 반도체학술대회 | - |
| dc.relation.isPartOf | 제 29회 한국 반도체학술대회 초록집 | - |
| dc.citation.title | 제 29회 한국 반도체학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2022-01-24 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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