Dynamic Clustering for Wafer Map Patterns Using Self-Supervised Learning on Convolutional Autoencoders
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Donghwa | - |
dc.contributor.author | Kang, Pilsung | - |
dc.date.accessioned | 2022-02-15T09:41:43Z | - |
dc.date.available | 2022-02-15T09:41:43Z | - |
dc.date.created | 2022-02-08 | - |
dc.date.issued | 2021-11 | - |
dc.identifier.issn | 0894-6507 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/135846 | - |
dc.description.abstract | Defect pattern analysis in wafer bin maps (WBM) plays a significant role in the semiconductor manufacturing process because it helps identify problematic steps or equipment so that process engineers can take appropriate actions to improve the overall yield. Clustering algorithms have been widely used to detect different defect patterns. However, most clustering algorithms, such as K-means clustering and self-organizing map, are required to determine the number of clusters in advance. To resolve this issue, we propose a self-supervised learning-based dynamic WBM clustering method. The proposed model first uses pseudo-labeled data, of which, the labels are dynamically determined by the Dirichlet process mixture model (DPMM). Thereafter, it is fine-tuned using pseudo-labels in a self-supervised manner. Experimental results based on the WM-811K dataset indicate that the proposed model not only outperforms the benchmark models but also demonstrates robustness to hyperparameters. In addition, the defect patterns identified by our model are more accurately and distinctively localized than those identified by the benchmark models. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | DEFECT PATTERNS | - |
dc.subject | K-MEANS | - |
dc.subject | RECOGNITION | - |
dc.subject | IDENTIFICATION | - |
dc.title | Dynamic Clustering for Wafer Map Patterns Using Self-Supervised Learning on Convolutional Autoencoders | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Kang, Pilsung | - |
dc.identifier.doi | 10.1109/TSM.2021.3107720 | - |
dc.identifier.scopusid | 2-s2.0-85113843364 | - |
dc.identifier.wosid | 000712563400006 | - |
dc.identifier.bibliographicCitation | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.34, no.4, pp.444 - 454 | - |
dc.relation.isPartOf | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | - |
dc.citation.title | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | - |
dc.citation.volume | 34 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 444 | - |
dc.citation.endPage | 454 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Manufacturing | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | DEFECT PATTERNS | - |
dc.subject.keywordPlus | K-MEANS | - |
dc.subject.keywordPlus | RECOGNITION | - |
dc.subject.keywordPlus | IDENTIFICATION | - |
dc.subject.keywordAuthor | Feature extraction | - |
dc.subject.keywordAuthor | Semiconductor device modeling | - |
dc.subject.keywordAuthor | Image reconstruction | - |
dc.subject.keywordAuthor | Clustering algorithms | - |
dc.subject.keywordAuthor | Visualization | - |
dc.subject.keywordAuthor | Data models | - |
dc.subject.keywordAuthor | Clustering methods | - |
dc.subject.keywordAuthor | Convolutional autoencoder | - |
dc.subject.keywordAuthor | deep clustering | - |
dc.subject.keywordAuthor | Dirichlet process | - |
dc.subject.keywordAuthor | pseudo-labels | - |
dc.subject.keywordAuthor | self-supervised learning | - |
dc.subject.keywordAuthor | wafer maps | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
(02841) 서울특별시 성북구 안암로 14502-3290-1114
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.