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Fabrication of Differently Shaped Polymeric Nanoneedle Arrays via Multistep Plasma Etching Using Silica Microparticles as Masks

Authors
Lee, Dong-HyunPark, Hyung JoonPark, Yong Gi ChaLee, Kyu Back
Issue Date
9월-2021
Publisher
WILEY-V C H VERLAG GMBH
Keywords
Dry etching; Nanofabrication; Nanostructure; Plasma; Polymer
Citation
BULLETIN OF THE KOREAN CHEMICAL SOCIETY, v.42, no.9, pp.1204 - 1209
Indexed
SCIE
SCOPUS
KCI
Journal Title
BULLETIN OF THE KOREAN CHEMICAL SOCIETY
Volume
42
Number
9
Start Page
1204
End Page
1209
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/136422
DOI
10.1002/bkcs.12343
ISSN
0253-2964
Abstract
We established a method to produce differently shaped polymeric nanoneedle arrays using silica microparticles by using multistep plasma etch processes. The etching conditions of each step were determined by exploring etching parameters such as power, bias power, gas composition and amount, pressure and time. The silica microparticles became unstable and irregular nanoneedle arrays were formed due to difference of etching rates between silica and polymer when silica microparticles were etched continuously in one step. Through the introduction of stabilization step in which selective etching is done on silica microparticle to reduce the diameter of silica microparticles and hence to move the center of mass of the silica microparticle inward, the instability of silica mask was removed and irregularity of nanostructures was minimized. As a result, multistep etching process to fabricate polymeric nanoneedle arrays was established. Depending on the conditions of each step, polymeric nanostructure arrays with various morphology were fabricated.
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