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Atomic Layer Deposition 방법을 이용한 Zinc Oxide Hybrid 박막의 기계적 물성 향상
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Song, Yongnam | - |
| dc.date.accessioned | 2022-06-04T12:40:21Z | - |
| dc.date.available | 2022-06-04T12:40:21Z | - |
| dc.date.created | 2022-06-04 | - |
| dc.date.issued | 2022-05-12 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/141553 | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | Atomic Layer Deposition 방법을 이용한 Zinc Oxide Hybrid 박막의 기계적 물성 향상 | - |
| dc.title.alternative | N/A | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Song, Yongnam | - |
| dc.identifier.bibliographicCitation | 한국정밀공학회 2022년도 추계학술대회 | - |
| dc.relation.isPartOf | 한국정밀공학회 2022년도 추계학술대회 | - |
| dc.relation.isPartOf | 한국정밀공학회 2022년도 추계학술대회 | - |
| dc.citation.title | 한국정밀공학회 2022년도 추계학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2022-05-11 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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