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Point Cloud Based Representations Learning for Wafer Pattern Recognition in Semiconductor Fabrication Process
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jun-Geol Baek | - |
| dc.date.accessioned | 2022-08-06T05:40:38Z | - |
| dc.date.available | 2022-08-06T05:40:38Z | - |
| dc.date.created | 2022-08-06 | - |
| dc.date.issued | 2022-07-20 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/142676 | - |
| dc.publisher | KSPE | - |
| dc.title | Point Cloud Based Representations Learning for Wafer Pattern Recognition in Semiconductor Fabrication Process | - |
| dc.title.alternative | Point Cloud Based Representations Learning for Wafer Pattern Recognition in Semiconductor Fabrication Process | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Jun-Geol Baek | - |
| dc.identifier.bibliographicCitation | International Conference on Precision Engineering and Sustainable Manufacturing 2022 (PRESM 2022) | - |
| dc.relation.isPartOf | International Conference on Precision Engineering and Sustainable Manufacturing 2022 (PRESM 2022) | - |
| dc.relation.isPartOf | PRESM 2022 | - |
| dc.citation.title | International Conference on Precision Engineering and Sustainable Manufacturing 2022 (PRESM 2022) | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | Jeju, Korea | - |
| dc.citation.conferenceDate | 2022-07-20 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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