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Temperature Dependence of ZnO Growth Mechanism on Si(100) Substrate by Atomic Layer Deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | BYUN, Dong Jin | - |
| dc.date.accessioned | 2021-08-27T20:07:48Z | - |
| dc.date.available | 2021-08-27T20:07:48Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2018-11-08 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/16390 | - |
| dc.publisher | Materials Research Society of Korea | - |
| dc.title | Temperature Dependence of ZnO Growth Mechanism on Si(100) Substrate by Atomic Layer Deposition | - |
| dc.title.alternative | Temperature Dependence of ZnO Growth Mechanism on Si(100) Substrate by Atomic Layer Deposition | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | BYUN, Dong Jin | - |
| dc.identifier.bibliographicCitation | The 5th Korea-Japan International Symposium on Materials Science and Technology 2018 | - |
| dc.relation.isPartOf | The 5th Korea-Japan International Symposium on Materials Science and Technology 2018 | - |
| dc.relation.isPartOf | The 5th Korea-Japan International Symposium on Materials Science and Technology 2018 | - |
| dc.citation.title | The 5th Korea-Japan International Symposium on Materials Science and Technology 2018 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2018-11-07 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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