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A study on the mechanical and electrical properties of atomic and molecular layer deposited ZnO – zincone alloy thin films with change of molecular backbone structures
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Byoung-Ho Choi | - |
| dc.date.accessioned | 2021-08-27T22:24:57Z | - |
| dc.date.available | 2021-08-27T22:24:57Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2018-07-30 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/18220 | - |
| dc.publisher | American Vacuum Society | - |
| dc.title | A study on the mechanical and electrical properties of atomic and molecular layer deposited ZnO – zincone alloy thin films with change of molecular backbone structures | - |
| dc.title.alternative | A study on the mechanical and electrical properties of atomic and molecular layer deposited ZnO – zincone alloy thin films with change of molecular backbone structures | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Byoung-Ho Choi | - |
| dc.identifier.bibliographicCitation | ALD 2018 (18th International Conference on Atomic Layer Deposition) | - |
| dc.relation.isPartOf | ALD 2018 (18th International Conference on Atomic Layer Deposition) | - |
| dc.relation.isPartOf | ALD 2018 | - |
| dc.citation.title | ALD 2018 (18th International Conference on Atomic Layer Deposition) | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2018-07-29 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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