Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect

Kang Yoon Mook

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Study on hydrogen passivation behavior of SiNx film and its thermal annealing effectStudy on hydrogen passivation behavior of SiNx film and its thermal annealing effect

Alternative Title: Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect

Authors: Kang Yoon Mook

Issue Date: 14-6월-2018

Publisher: IEEE PVSEC

Citation: WCPEC-7

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/18803

Conference Name: WCPEC-7

Place: US

Conference Date: 2018-06-10

Files in This Item: There are no files associated with this item.

Appears in Collections: Graduate School of Energy and Environment (KU-KIST GREEN SCHOOL) > Department of Energy and Environment > 2. Conference Papers

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