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Study on Hydrogen Passivation Behavior of Al2O3/SiNx Film and its Thermal Annealing Effect
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hae-Seok LEE | - |
| dc.date.accessioned | 2021-08-28T01:27:50Z | - |
| dc.date.available | 2021-08-28T01:27:50Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2018-03-14 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/20126 | - |
| dc.publisher | Korea Photovoltaic Society | - |
| dc.title | Study on Hydrogen Passivation Behavior of Al2O3/SiNx Film and its Thermal Annealing Effect | - |
| dc.title.alternative | Study on Hydrogen Passivation Behavior of Al2O3/SiNx Film and its Thermal Annealing Effect | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Hae-Seok LEE | - |
| dc.identifier.bibliographicCitation | Global Photovoltaic Conference 2018 | - |
| dc.relation.isPartOf | Global Photovoltaic Conference 2018 | - |
| dc.relation.isPartOf | Global Photovoltaic Conference 2018 | - |
| dc.citation.title | Global Photovoltaic Conference 2018 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 광주 (김대중 컨벤션센터) | - |
| dc.citation.conferenceDate | 2018-03-14 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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