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Formation of GaN with Void on Patterned Sapphire Substrate by Carbonization of PhotoresistFormation of GaN with Void on Patterned Sapphire Substrate by Carbonization of Photoresist
- Alternative Title
- Formation of GaN with Void on Patterned Sapphire Substrate by Carbonization of Photoresist
- Authors
- BYUN, Dong Jin
- Issue Date
- 23-11월-2017
- Publisher
- KIEEME
- Citation
- ICAE 2017
- Conference Name
- ICAE 2017
- Place
- KO
- Conference Date
- 2017-11-21
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