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Formation of Air Void on Patterned Sapphire Substrate by Selective Photoresist Carbonization
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | BYUN, Dong Jin | - |
| dc.date.accessioned | 2021-08-28T05:48:06Z | - |
| dc.date.available | 2021-08-28T05:48:06Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2017-08-25 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/22822 | - |
| dc.publisher | The Materials Science Society of Japan | - |
| dc.title | Formation of Air Void on Patterned Sapphire Substrate by Selective Photoresist Carbonization | - |
| dc.title.alternative | Formation of Air Void on Patterned Sapphire Substrate by Selective Photoresist Carbonization | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | BYUN, Dong Jin | - |
| dc.identifier.bibliographicCitation | Japan-Korea Materials Science Technology 2017 | - |
| dc.relation.isPartOf | Japan-Korea Materials Science Technology 2017 | - |
| dc.relation.isPartOf | The 4th japan-Korea International Symposium on Materials Science and Technology | - |
| dc.citation.title | Japan-Korea Materials Science Technology 2017 | - |
| dc.citation.conferencePlace | JA | - |
| dc.citation.conferenceDate | 2017-08-24 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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